Preparation and characterization of high-k aluminium oxide thin films by atomic layer deposition for gate dielectric applications (Record no. 76895)
[ view plain ]
000 -LEADER | |
---|---|
fixed length control field | 00830nam a22001937a 4500 |
005 - DATE AND TIME OF LATEST TRANSACTION | |
control field | 20121217151358.0 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 121217t xxu||||| |||| 00| 0 eng d |
080 ## - UNIVERSAL DECIMAL CLASSIFICATION NUMBER | |
Universal Decimal Classification number | 537.226:539.23 |
Item number | ANU T |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Anu philip |
245 ## - TITLE STATEMENT | |
Title | Preparation and characterization of high-k aluminium oxide thin films by atomic layer deposition for gate dielectric applications |
Statement of responsibility, etc | Anu Philip; guided by K. Rajeev Kumar |
300 ## - PHYSICAL DESCRIPTION | |
Extent | 202p. |
653 ## - INDEX TERM--UNCONTROLLED | |
Uncontrolled term | Dielectronics - high K-materials |
653 ## - INDEX TERM--UNCONTROLLED | |
Uncontrolled term | Atomic layer deposition of Aluminium oxide thin films |
653 ## - INDEX TERM--UNCONTROLLED | |
Uncontrolled term | MOS Capacitors |
700 ## - ADDED ENTRY--PERSONAL NAME | |
Personal name | Rajeev Kumar, K; guided by |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
item type | Theses |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
Place of publication, distribution, etc | Kochi |
Name of publisher, distributor, etc | Department of Instrumentations; Cusat |
Date of publication, distribution, etc | 2011 |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
-- | 22398 |
Lost status | Source of classification or shelving scheme | Not for loan | Home library | Current library | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
---|---|---|---|---|---|---|---|---|---|---|---|---|
Universal Decimal Classification | Not For Loan | University Library | University Library | Reference | 17/12/2012 | 537.226:539.23 ANU T | T0000555 | 17/12/2012 | 17/12/2012 | Theses |