Selected papers on resolution enhancement techniques in optical lithography-Bellingham (Record no. 8816)
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000 -LEADER | |
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fixed length control field | 00775nam a22001817a 4500 |
005 - DATE AND TIME OF LATEST TRANSACTION | |
control field | 20091019145252.0 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 091019t xxu||||| |||| 00| 0 eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 0-8194-5166-5 |
080 ## - UNIVERSAL DECIMAL CLASSIFICATION NUMBER | |
Universal Decimal Classification number | 621.3.049.77 |
Item number | SCH |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Schellenberg, F.M. [ed.] |
Role | ed. by |
245 ## - TITLE STATEMENT | |
Title | Selected papers on resolution enhancement techniques in optical lithography-Bellingham |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
Place of publication, distribution, etc | Washington |
Name of publisher, distributor, etc | SPIE Press |
Date of publication, distribution, etc | 2004 |
300 ## - PHYSICAL DESCRIPTION | |
Extent | xx, 875p. |
490 ## - SERIES STATEMENT | |
Series statement | (SPIE milestone series v.178) |
653 ## - INDEX TERM--UNCONTROLLED | |
Uncontrolled term | Integrated circuits-design and construction |
-- | Microlithography |
-- | Photolithography |
-- | semiconductors-Etching |
-- | Optical lithography |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
item type | Books |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
-- | 7462 |
Lost status | Source of classification or shelving scheme | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
---|---|---|---|---|---|---|---|---|---|---|---|
Universal Decimal Classification | University Library | University Library | 19/10/2009 | 621.3.049.77 SCH | 00053942 | 19/10/2009 | 19/10/2009 | Books |