TY  - BOOK
AU  - Jackson, Mark J.
TI  - Microfabrication and nanomanufacturing
SN  - 0-8247-2431-3
PY  - 2006///
CY  - Boca Raton
PB  - CRC Press
KW  - Nanotechnology
KW  - Nanomanufacturing
ER  -