TY  - GEN
AU  -  Lyshevski,Sergey Edward
TI  - MEMS and NEMS: systems devices and structures
SN  - 9780849312625
PY  - 2013///
CY  - Florida
PB  - Taylor & Francis Ltd
KW  - Microelectromechanical systems
KW  - Nanoelectromechanical systems
ER  -