00510nam a22001577a 4500 117751 117750 OSt 20260706113113.0 231103b ||||| |||| 00| 0 eng d 9783110649741 537.1 KIE Kieninger, Jochen 1622 Electrochemical methods for the Micro and Nano Scale Theoretical Esentials , Instrumentation and methods for applications in MEMS and Nanotechnology Boston De Gruyter GMBH 2022 382P ddc REF