TY  - BOOK
AU  - Horne, Douglas F
AU  - 
TI  - Photomasks, scales and gratings
U1  - 621.3.049.77 
PY  - 1983///
CY  - Bristol
PB  - Adam Higler
KW  - Microelectronics
KW  - Electronics
KW  - Semiconductors
KW  - Electronic circuits
N1  -  Bibliog. p.193-197
ER  -