TY - BOOK AU - Jowett, C E AU - TI - Engineering of micro electronic thin and thick films U1 - 621.3.049.772 PY - 1976/// CY - London PB - Macmillan KW - microelectonics KW - Thin films KW - Thick films KW - microelectronic thin films KW - microelectronic thick films ER -