TY  - BOOK
AU  - Berry, Robert W.
AU  - 
TI  - Thin film technology
U1  - 621.3.049.772.2 
PY  - 1968///
CY  - New York
PB  - Van Nostrand Reinhold Company
KW  - Microelectronics
KW  - Electronics
KW  - Semiconductors
KW  - Thin films
ER  -