TY  - BOOK
AU  - Sivaraman, S. 
TI  - Chemical vaper deposition, Thermal & plasma deposition of electronic materials 
SN  - 0-442-01079-6
PY  - 1995///
CY  - New York 
PB  - Van Nostrand reinheld 
KW  - Microelectronics industry
KW  - Chemical vapour deposition
KW  - Micro electronics-materials
ER  -