TY  - BOOK
AU  - Trimmer,William
AU  - 
TI  - Micromechanics & MENS; classic & Seminal Papers to 1990
SN  - 0-7803-1085-3
U1  - 621.3.049.77 
PY  - 1997///
CY  - New York
PB  - Institute of Electrical & Electronics Engineers
KW  - Microelectronics
KW  - Electronics
KW  - Semiconductors
KW  - Electromechanical devices
KW  - MICROMECHANICAL  DEVICES
KW  - Actuators
N1  -  "A Selected Reprint volume"
ER  -