TY - BOOK AU - Hippler, Rainer AU - ...[et al.] TI - Low temperature plasma physics: fundamental aspects and applicaions SN - 3-527-28887-2 U1 - 533.9 PY - 2001/// CY - Berlin PB - Wiley-VCH KW - Plasma physcis KW - Plasma physics KW - plasma technology ER -