TY - BOOK AU - Fecht, Hans-Jorg AU - Werner, Matthias TI - nano-micro interface: bridging the micro and nano worlds SN - 3-527-30978-0 U1 - 608.001.76 PY - 2004/// CY - Weinheim PB - Wiley-VCH KW - Nanotechnology KW - Nanoscience KW - Micro system technology- Nanotechnology ER -