TY  - BOOK
AU  - Hsu, Tai-Ran
AU  - 
TI  - MEMS and microsystems: design and manufacture
SN  - 0-07-048709-x
U1  - 621.38 
PY  - 2005///
CY  - New Delhi
PB  - Tata McGraw- Hill
KW  - Microelectronics
KW  - Electronics
KW  - Semiconductors
KW  - Microelectromechanical systems
KW  - MEMS
KW  - Microelectronic packaging
ER  -