TY  - BOOK
AU  - Ehmann, Kornel F.
AU  - ...[et al.]
TI  - Micromanufacturing: international  research and development
SN  - 9781402059483
U1  - 67.02-181.4 
PY  - 2007///
CY  - Dordrecht
PB  - Springer
KW  - Microfabrication
KW  - Micromachining
KW  - Micromanufacturing
ER  -