TY  - BOOK
AU  - Gardner, Julian W.
AU  - 
TI  - Microsensor, MEMS and smart devices
SN  - 0-471-86109-x
U1  - 621.382 
PY  - 2007///
CY  - Chichester
PB  - John Wiley & Sons
KW  - Microelectronics
KW  - Electronics
KW  - Semiconductors
KW  - MEMS
KW  - Microelectromechanical systems
KW  - Microsensors
KW  - Micromachines
ER  -