TY  - BOOK
AU  - Tseng, Ampere A.
AU  - 
TI  - Nanofabrication: fundamentals and applications
SN  - 9789812700766
U1  - 620.3 
PY  - 2008///
CY  - Singapore
PB  - World Scientific Publishing
KW  - Nano technology
KW  - Nano fabrication
KW  - Nano scale structures
KW  - Nano devices
KW  - Fabrication - Nano technology
ER  -