TY  - BOOK
AU  - Reinhardt, Karen. A.
AU  - Kern, Werner
TI  - Handbook of silicon wafer cleaning technology
SN  - 9780815515548
U1  - 621.315.617 
PY  - 2008///
CY  - Norwich
PB  - William Andrew
KW  - Silcon-on-insulator technology
KW  - Silicon wafer
KW  - Dry cleaning
KW  - Wet chemical processes
KW  - Plasma stripping
ER  -