TY  - BOOK
AU  - Ostrikov, Kostya(Ken)
AU  - Xu, Shuyan
TI  - Plasma-Aided nanofabrication:from plasma sources to nanoassembly
SN  - 9783527406333
U1  - 620.1.03 
PY  - 2007///
CY  - Weinhein
PB  - Wiley - VCH
KW  - Nanostructured materials
KW  - Plasma engineering
KW  - Low temparature plasmas
KW  - Manufactureing processes
ER  -