TY  - BOOK
AU  - Baglio, Salvatore
AU  - Castorina, Saslvatore
TI  - Scaling issues and design  of MEMS
SN  - 9780470016992
U1  - 621.382 
PY  - 2007///
CY  - Chichester
PB  - John Wiley and Sons
KW  - Microelectromechanical  systems - design and construction
KW  - MEMS
ER  -