TY  - BOOK
AU  - Liu, Ai-Qun...[et.al]
TI  - Photonic MEMS devices: design,fabrication and control
SN  - 9781420045680
PY  - 2009///
CY  - Boca Raton
PB  - CRC Press
KW  - Microelectromechanical systems
ER  -