TY  - BOOK
AU  - Laser
AU  - 
TI  - Laser microfabrication: thin film process and lithography
U1  - 621.375.826:539.23 
PY  - 1989///
CY  - Boston
PB  - Academic Press
KW  - laser fabrication
KW  - Thin film process
KW  - lithography
KW  - Ehrlich, Daniel J
ER  -