TY  - BOOK
AU  - Stuart , R. V
AU  - 
TI  - Vacuum Technology , Thin Films , and Sputtering , an Introduction
U1  - 621.52 
PY  - 1983///
CY  - New York
PB  - Academic Press
KW  - Thin films ,Vacuum Technology
KW  - Sputterng , Thin Films-Vacuum Technology
ER  -