TY - GEN AU - Jha, A.R TI - MEMS and nanotechnology-based sensors and devices for communications, medical and aerospace applications SN - 9780849380693 PY - 2008/// CY - Boca Raton PB - CRC KW - Microelectromechanical systems KW - Detectors KW - Telecommunication - equipment and supplies KW - Medical instruments and apparatus KW - Aerospace engineering - equipment and supplies KW - Aeronautics - equipment and supplies ER -