TY  - GEN
AU  - Madou, Marc J
TI  - Fundamentals of microfabrication and nanotechnology
SN  - 978142005545
PY  - 2012///
CY  - Boca Raton
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Nano electromechanical systems
KW  - Microfluidics
KW  - Solidstate physics
N1  - V1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology  V2.Manufacturing techniques for microfabrication and nano technology  V3. From Mems to 
Bio-MEMS and Bio-NEMS
ER  -