TY  - GEN
AU  - Utke, Ivo; ed.,
AU  - Moshkalev, Stanislav
AU  - Russell, Phillip
TI  - Nanofabrication using focused ion and electron beams: principles and applications 
T2  - Nanomanufacturing series
SN  - 9780199734214
PY  - 2012///
CY  - New York
PB  - Oxford University Press
KW  - Nanostructured materials
KW  - Ion beam nanotechnology
KW  - Electron beams - Industrial applications
ER  -