TY  - GEN
AU  - Lee, Ki Bang 
TI  - Principles of microelectromechanical systems
SN  - 9780470466346
PY  - 2011///
CY  - New Jersey
PB  - John Wiley
KW  - Microelectromechanical systems
KW  - Electrostatic actuators
KW  - Electromagnetic actuators
ER  -