TY  - GEN
AU  - Lee, El-Hang...[et.al];ed.,
TI  - VLSI micro-and nanophotonics: science technology and  applications
SN  - 9781574447293
PY  - 2011///
CY  - Boca Raton
PB  - CRC press
KW  - Microelectromechanical systems-technological innovations
KW  - Nanophotonics-technological innovations
KW  - Intergrated circuits-very large scale integration
ER  -