TY  - GEN
AU  - Harding, Kevin; ed.
TI  - Handbook of optical dimensional metrology
T2  - Optics and optoelectronics
SN  - 9781439854815
PY  - 2013///
CY  - Boca Raton
PB  - CRC Press
KW  - Measurement - Handbook
KW  - Optical measurements
KW  - Dimensional analysis
ER  -