TY  - GEN
AU  - Makabe, Toshiaki
AU  - Petrovic, Zoran Lj; ed. by
TI  - Plasma electronics: applications in microelectronic device fabrication
SN  - 9781482222050
PY  - 2015///
CY  - New York
PB  - CRC Press
KW  - Plasma engineering
KW  - Low temperature plasma
KW  - Plasma processing
ER  -