TY  - GEN
AU  - Brand, Oliver
AU  - Fedder, Gary K; ed.
TI  - CMOS-MEMS
T2  - Advanced micro and nanosystems
SN  - 9783527334995
PY  - 2013///
CY  - Germany
PB  - Wiley-VCH Verlag
KW  - Integrated circuits design
KW  - CMOS-MEMS-Biological and chemical application
KW  - Microelectromechanical systems
KW  - CMOS based sensors
ER  -