TY  - GEN
AU  - Yoshizawa, Toru; ed.,
TI  - Handbook of optical metrology: principles and applications
SN  - 9781466573598
PY  - 2015///
CY  - Boca Raton
PB  - CRC press
KW  - Optical metrology - light - Measurements
KW  - Photometry
KW  - Metrology
ER  -