TY  - BOOK
AU  - Fujita, H. 
TI  - Micromachines as tools for nanotechnology
SN  - 81-8128-202-7
PY  - 2004///
CY  - New Delhi
PB  - Springer
KW  - Microtechnology
KW  - MEMS
KW  - Nanotechnology
ER  -