TY  - GEN
AU  - Gatzen, Hans H
AU  - Saile, Volker
AU  - Leuthold, Jurg
TI  - Micro and nanofabrication: tools and processes
SN  - 9783662443941
PY  - 2015///
CY  - Newyork 
PB  - Springer
KW  - Microelectromechanical system(MEMS)
KW  - Nanoelectromechanical system(NEMS)
KW  - Microfabrication
ER  -