TY  - BOOK
AU  - Schellenberg, F.M. [ed.]
TI  - Selected papers on resolution enhancement techniques in optical lithography-Bellingham 
T2  - (SPIE milestone series v.178)
SN  - 0-8194-5166-5
PY  - 2004///
CY  - Washington 
PB  - SPIE Press 
KW  - Integrated circuits-design and construction
KW  - Microlithography
KW  - Photolithography
KW  - semiconductors-Etching
KW  - Optical lithography
ER  -