TY  - BOOK
AU  - Cui, Zheng
TI  - Micro - nano fabrication: technologies and applications
SN  - 7-04-017663-7
PY  - 2005///
CY  - Beijing
PB  - Higher education press
KW  - Optical lithography
KW  - Electron beam lithography
KW  - Ion beam lithography
KW  - Fabrication technologies
ER  -