TY  - BOOK
AU  - Gad-el-Hak, Muhamed [ed.]
TI  - MEMS: introduction and fundamentals
T2  - (Mechanical Engineering) 
SN  - 0-8493-9137-7
PY  - 2006///
CY  - Boca Raton
PB  - CRC Taylor & Francis
KW  - Microelectronics
KW  - Nanotechnology
KW  - Microelectromechanical systmes
KW  - MEMs-fundamentals
N1  - V.1: Introduction and fundamentals, V.2: Design and fabrication, V.3: Applications
ER  -