TY - GEN AU - Sunipa Roy AU - Sarkar, Chandan Kumar TI - MEMS and nanotechnology for Gas sensors SN - 9781498700122 PY - 2015/// CY - London PB - CRC press KW - Microelectromechanical systems KW - Gas detectors KW - Nanotechnology KW - Nanomanufacturing KW - Nanostructured materials KW - Microelectromechanical systems- Design and construction ER -