TY  - BOOK
AU  - Ardito, Raffaele
AU  - Comi, Claudia
AU  - Frangi, Attilio
AU  - Ghisi, Aldo
AU  - Mariani, Stefano
ED  - Corigliano Alberto
TI  - Mechanics of microsystems
T2  - The Wiley micro system and nanotechnology series
SN  - 9781119053835
PY  - 2018///
CY  - Chennai
PB  - Wiley
KW  - Microelectromechanical systems
KW  - MEMS
ER  -