TY  - BOOK
AU  - Mahalik, Nitaigour Premchand
AU  - 
TI  - MEMS
SN  - 9780070634459
U1  - 621.382 
PY  - 2007///
CY  - New Delhi
PB  - Tata McGraw-Hill
KW  - Microelectronics
KW  - Electronics
KW  - Semiconductors
KW  - Microelectromechanical systems
KW  - MEMS
KW  - Micro sensors
ER  -