TY  - GEN
AU  - Kempe, Volker 
TI  - Inertial MEMS: principles and practice
SN  - 9780521766586
PY  - 2011///
CY  - Cambridge 
PB  - Cambridge University Press 
KW  - Microelectromechanical systems - MEMS
KW  - Inertial navigation systems
KW  - BioMEMS
ER  -