TY  - GEN
AU  - Kubby, Joel A 
TI  - Guide to hands-on MEMS design and prototyping 
SN  - 9780511984662 
PY  - 2011///
CY  - Cambridge
PB  - Cambridge University Press 
KW  - MEMS design
KW  - Optoelectronic devices and nanotechnology
KW  - Engineering design
KW  - Kinematics and robotics
UR  - https://www.cambridge.org/core/books/guide-to-handson-mems-design-and-prototyping/21D6823D820A3157DA21B89628BDD4AB
ER  -