TY  - GEN
AU  - Vinoy, K.J....[et.al.]
TI  - Micro and smart devices and systems
T2  - Springer tracts in mechanical engineering
SN  - 9788132219125
PY  - 2014///
CY  - New Delhi
PB  - Springer
KW  - Microsensors
KW  - Microactuators
KW  - Microelectronics
KW  - MEMS
ER  -