TY  - BOOK
AU  - Wilkening, G.
TI  - Nanoscale calibration standards and methods: dimeensional and related measurements in the micro-and nanometer range
SN  - 3-527-40502-x
PY  - 2005///
CY  - Germany
PB  - Wiley VCH
KW  - Nanometrology
KW  - Nanomeasuring
KW  - Nanoscale
KW  - Nanostructed materials - Measurement
KW  - Microstructure -  Measurement - Congress
KW  - Stereology - Congresses
KW  - Calibration - Nanometerology
ER  -