| 000 | 00554nam a22001697a 4500 | ||
|---|---|---|---|
| 005 | 20091204094124.0 | ||
| 008 | 091204t xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0-8247-2431-3 | ||
| 080 |
_a621.7/.9 _bJAC |
||
| 100 |
_aJackson, Mark J. _99819 |
||
| 245 | _aMicrofabrication and nanomanufacturing | ||
| 260 |
_aBoca Raton _bCRC Press _c2006 _96488 |
||
| 300 | _a401p. | ||
| 653 |
_aNanotechnology _aNanomanufacturing |
||
| 942 | _cBK | ||
| 952 |
_w2009-12-04 _p00055109 _r2009-12-04 _40 _00 _bUL _10 _o621.7/.9 JAC _d2009-12-04 _70 _2udc _yBK _aUL |
||
| 999 |
_c10181 _d10180 |
||