| 000 | a | ||
|---|---|---|---|
| 999 |
_c109021 _d109020 |
||
| 005 | 20230123142313.0 | ||
| 008 | 221201b ||||| |||| 00| 0 eng d | ||
| 020 | _a9780849312625 | ||
| 080 |
_a621.382:620.3 _bLYS/M |
||
| 100 | _a Lyshevski,Sergey Edward | ||
| 245 | _aMEMS and NEMS: systems devices and structures | ||
| 260 |
_bTaylor & Francis Ltd _aFlorida _c2013 |
||
| 300 | _a461p. | ||
| 653 | _aMicroelectromechanical systems | ||
| 653 | _aNanoelectromechanical systems | ||
| 942 | _cBK | ||