000 00523 a2200169 4500
005 20240423093823.0
008 240301b |||||||| |||| 00| 0 eng d
020 _a9789811257599
080 _a621.382:543.42
_bPRO/S
100 _aProtopopov,Vladimir
245 _aSpectroscopic techniques for semiconductor industry
260 _aSingapore
_bWorld Scientific
_c2023
300 _axiv,310p.
653 _aSemiconductors - Design and Construction
653 _aSpectrum analysis - Industrial application
942 _cBK
999 _c112810
_d112809