000 00796nam a2200253 a 4500
001 adlib96000001
003 ViArRB
005 200902210153555.7
008 960221s1955 dcuabcdjdbkoqu001 0deng d
020 _a
022 _a
040 _aAdlib
082 _a541.12.034.6
245 _aChemical vapour deposition [proceedings]
250 _a
260 _aPanington
_bThe Electrochemical Society
_c1987
300 _axv, 1269p.
_c
500 _a Conference: International conference on chemical vapour deposition: 10th: 1987: Panington
100 _aCullan, G W
_ed. by
700 _a
_a
942 _cBK
653 _aChemical vapour deposition
952 _w2010-06-16
_pG0004497
_r2011-03-11
_40
_00
_bUL
_10
_o541.12.034.6 CUL
_d2010-06-16
_70
_yBK
_s2011-02-18
_l2
_aUL
999 _c18538
_d18537