| 000 | 00685nam a22001697a 4500 | ||
|---|---|---|---|
| 005 | 20090827121022.0 | ||
| 008 | 090827t xxu||||| |||| 00| 0 eng d | ||
| 080 |
_a621.3.049.77 _bSIV |
||
| 100 |
_aSivaraman, S. _93522 |
||
| 245 | _aChemical vaper deposition, Thermal & plasma deposition of electronic materials | ||
| 300 | _axii, 292p. | ||
| 653 |
_aMicroelectronics industry _aChemical vapour deposition _aMicro electronics-materials |
||
| 942 | _cBK | ||
| 260 |
_aNew York _bVan Nostrand reinheld _c1995 _93523 |
||
| 020 | _a0-442-01079-6 | ||
| 952 |
_w2009-08-27 _p00041594 _r2011-07-19 _40 _00 _bUL _10 _o621.3.049.77 SIV _d2009-08-27 _70 _2udc _yBK _s2011-06-16 _l6 _aUL |
||
| 999 |
_c3159 _d3159 |
||