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| 020 | _a0-7803-1085-3 | ||
| 022 | _a | ||
| 040 | _aAdlib | ||
| 082 | _a621.3.049.77 | ||
| 245 | _aMicromechanics & MENS; classic & Seminal Papers to 1990 | ||
| 250 | _a | ||
| 260 |
_aNew York _bInstitute of Electrical & Electronics Engineers _c1997 |
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| 300 |
_axv,701p _c |
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| 500 | _a "A Selected Reprint volume" | ||
| 100 |
_aTrimmer,William _e |
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| 700 |
_a _a |
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| 942 | _cBK | ||
| 653 |
_aMicroelectronics _aElectronics _aSemiconductors _aElectromechanical devices _aMICROMECHANICAL DEVICES _aActuators |
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