000 00724nam a2200253 a 4500
001 adlib96000001
003 ViArRB
005 200902210153555.7
008 960221s1955 dcuabcdjdbkoqu001 0deng d
020 _a0-85296-998-8
022 _a
040 _aAdlib
082 _a621.3:661.665.1
245 _aProcess technology for silicon carbide devices
250 _a
260 _aLondon
_bINSPEC/IEE
_c2003
300 _axxii, 176p.
_c
500 _a
100 _aZetterling, Carl-Mikael
_eed. by
700 _a
_a
942 _cBK
653 _aSilicon carbide - Electric properties
952 _w2010-06-16
_p00050903
_r2010-06-16
_40
_00
_bUL
_10
_o621.3:661.665.1 ZET
_d2010-06-16
_70
_yBK
_aUL
999 _c46442
_d46441